Wafer Case for One Piece
	Name of Article: ProtosR Carrier MA Series Part Number MA-12/ONE-SP (Separate Type Blue Clip) MA-12/ONE-FX (Fixation Type Black Clip) Feature ? Single 12 inch wafer can be fed safely. Clean and low outgassing grade conductive material (ST-poly) is used for contamination concern. 8 inch wafer can be held with optional vacuum molded tray. Surface Resistivity 1×106Ω/□ or less Material Conductive Polycarbonate

Wafer Carrying Case
	Name of Article: ProtosR Carrier MA Series Part Number MA-5 (5inch carrier) MA-6 (6inch carrier) MA-6S(6inch slim carrier) MA-8 (8inch carrier) MA-8S(8inch slim carrier) MA-12 (12inch carrier) Feature ? Double-wall construction provides excellent impact resistance while wafers are firmly protected inside. ? Can be used by automatic wafer loading equipment (robots). ? A 3.5 inch floppy disk for data can be stored under the lid. (8 inches only) ? The lid and body are supplied as a set, which opens and closes by turning the lid. ? Partial filling acceptable. Surface Resistivity 1×106Ω/□ or less Material Conductive Polypropylene
	Name of Article: ProtosR Carrier MA Series Part Number ND-6 (correspond to dicing frame for 6 inch wafer) ND-8 (correspond to dicing frame for 8 inch wafer) Feature ? Simplify the packing of diced wafer on frame to increase work efficiency. ? Diced wafer on frame can be stacked up to 13 pieces. ? With stopper for dicing frame (It varies by the kind of frame) * Cushioning material and spacer correspond to diced wafer on frame (6 inch and 8 inch) are available. Please ask for more information. Surface Resistivity 1×106Ω/□ or less Material Conductive Polypropylene

Packing Example

Main Dimension Part Number Wafer Diameter H (mm) h (mm) D (mm) A (mm) MA-5 5 inch 90 50 128±1 150 MA-6 6 inch 90 50 153±1 175 MA-6S 6 inch 63 38 153±1 175 MA-8 8 inch 103 50 203±1 226 MA-8S 8 inch slim 65 38 203±1 226 MA-12 12 inch 76 44 302±1 328 ND-6 6 inch with frame 83 40 230±1 252 ND-8 8 inch with frame 92 57 299±1 322

Cushion Material
	Name of Article: ProtosR Cushion
		? PU Type (Anti-Static) Part Number MA-4U-5/10/15/20 (for 4 inch) MA-5U-5/10/15/20 (for 5 inch) MA-6U-5/10/15/20 (for 6 inch) MA-8U-5/10/15/20 (for 8 inch) MA-12U-5/10/15/20 (for 12 inch) Feature Shock Absorbing Anti-Static Cushion Surface Resistant Value 8×1011Ω/□ or less (22°C, 40%RH) Standard Available with 4 cushioning thicknesses: 5mm, 10mm, 15mm, 20mm Material Anti-Static Polyurethane ? PE Type (Conductive) Part Number MA-4PESD-1/3/5/10 (for 4 inch) MA-5PESD-1/3/5/10(for 5 inch) MA-6PESD-1/3/5/10(for 6 inch) MA-8PESD-1/3/5/10(for 8 inch) MA-12PESD-1/3/5/10(for 12 inch) Feature Shock absorbing, low ion contamination conductive cushion Surface Resistant Value 1×106Ω/□ or less (22°C, 40%RH) Standard Available with 4 cushioning thicknesses: 5mm, 10mm, 15mm, 20mm Material Conductive Polyethylene

Spacer Sheet
	Name of Article: ProtosR Spacer
		Part Number MA Type MA-4-65/120/230 MA-5-65/120/230 MA-6-65/120/230 MA-8-65/120/230/100N MA-12-65/120/230/100N Feature A conductive sheet that uses our ST-Fiber that produces little debris. Feasible design for automated handling design. Surface Resistivity 1×106Ω/□ or less (22°C, 40%RH) Standard Available with 3 sheet thicknesses: 50μm, 100μm, 200μm Material Conductive Olefin Resin Part Number PEA Type PEA4-350 PEA5-350 PEA6-350 PEA8-350 PEA12-350 Feature New type antistatic space with low particle counts and low ion contamination. Surface Resistivity 1×1011Ω/□ or less Standard Sheet thickness: 100μm, with height of emboss 350μm Material Conductive Polyethylene Part Number CRO-4-150/400 CRO-5-150/400 CRO-6-150/400 CRO-8-150/400 CRO-12-150/400 Feature New type antistatic space with low particle counts and low ion contamination. Surface Resistivity 1×106Ω/□ or less Standard Sheet thickness: 100μm, with height of emboss 150μ Sheet thickness: 70μ, with height of emboss 400μ Material Conductive Polyethylene